"Suppression of plasma-induced fluorine damage in P-HEMTs using strained ..."

Hiroyuki Uchiyama, Takafumi Taniguchi, Makoto Kudo (2004)

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DOI: 10.1587/ELEX.1.513

access: open

type: Journal Article

metadata version: 2022-06-10

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  - https://dblp.org/rec/journals/ieiceee/UchiyamaTK04
Hiroyuki Uchiyama, Takafumi Taniguchi, Makoto Kudo:
Suppression of plasma-induced fluorine damage in P-HEMTs using strained InSb barrier. IEICE Electron. Express 1(16): 513-517 (2004)

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