"1.3-mu m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas."

Hiroyuki Uchiyama et al. (2004)

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DOI: 10.1587/ELEX.1.193

access: open

type: Journal Article

metadata version: 2022-06-10

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Hiroyuki Uchiyama, Hiroshi Sato, Kazunori Shinoda, Akira Taike, Takafumi Taniguchi, Shinji Tsuji:
1.3-mu m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas. IEICE Electron. Express 1(7): 193-197 (2004)

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