"A scalable, optically-driven, high-voltage switch for remote MEMS device ..."

Isao Mori, Yuki Okamoto, Yoshio Mita (2017)

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DOI: 10.1587/ELEX.14.20161174

access: open

type: Journal Article

metadata version: 2021-02-12

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Isao Mori, Yuki Okamoto, Yoshio Mita:
A scalable, optically-driven, high-voltage switch for remote MEMS device operation fabricated with a standard CMOS process. IEICE Electron. Express 14(3): 20161174 (2017)

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