"Self-assembly technique for MEMS vertical comb electrostatic actuator."

Keiji Isamoto et al. (2005)

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DOI: 10.1587/ELEX.2.311

access: open

type: Journal Article

metadata version: 2021-02-12

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Keiji Isamoto, T. Makino, A. Moroswa, Chongho Chong, Hiroyuki Fujita, Hiroshi Toshiyoshi:
Self-assembly technique for MEMS vertical comb electrostatic actuator. IEICE Electron. Express 2(9): 311-315 (2005)

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