"A 2 x 2 array of the multi-degree-of freedom ultrasonic actuators for a ..."

Yasuyuki Goda et al. (2009)

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DOI: 10.1587/ELEX.6.317

access: open

type: Journal Article

metadata version: 2022-10-02

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  - https://dblp.org/rec/journals/ieiceee/GodaKNU09
Yasuyuki Goda, Daisuke Koyama, Kentaro Nakamura, Sadayuki Ueha:
A 2 x 2 array of the multi-degree-of freedom ultrasonic actuators for a low profile two-dimensional sliding table. IEICE Electron. Express 6(6): 317-321 (2009)

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