"Optimal integrated schedule of entire process of dual-blade multi-cluster ..."

Qinghua Zhu, Yan Qiao, Naiqi Wu (2019)

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DOI: 10.1109/JAS.2019.1911411

access: closed

type: Journal Article

metadata version: 2025-01-19

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Qinghua Zhu, Yan Qiao, Naiqi Wu:
Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down. IEEE CAA J. Autom. Sinica 6(2): 553-565 (2019)

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