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"Electrochemical planarization of interconnect metallization."
Alan C. West, Hariklia Deligianni, Panayotis C. Andricacos (2005)
- Alan C. West, Hariklia Deligianni, Panayotis C. Andricacos:
Electrochemical planarization of interconnect metallization. IBM J. Res. Dev. 49(1): 37-48 (2005)
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