"Application of cross-sectional transmission electron microscopy to ..."

Satoshi Tsuji, Katsuhiro Tsujimoto, Hideo Iwama (1998)

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DOI: 10.1147/RD.423.0509

access: closed

type: Journal Article

metadata version: 2020-03-13

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Satoshi Tsuji, Katsuhiro Tsujimoto, Hideo Iwama:
Application of cross-sectional transmission electron microscopy to thin-film-transistor failure analysis. IBM J. Res. Dev. 42(3): 509-516 (1998)

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