"Electrochemical Phenomena in Thin Films of Silicon Dioxide on Silicon."

Donald P. Seraphim et al. (1964)

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DOI: 10.1147/RD.84.0400

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - https://dblp.org/rec/journals/ibmrd/SeraphimBdF64
Donald P. Seraphim, Andrew E. Brennemann, Francois Max d'Heurle, Harold L. Friedman:
Electrochemical Phenomena in Thin Films of Silicon Dioxide on Silicon. IBM J. Res. Dev. 8(4): 400-409 (1964)

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