"Sputter deposition for semiconductor manufacturing."

Stephen M. Rossnagel (1999)

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DOI: 10.1147/RD.431.0163

access: closed

type: Journal Article

metadata version: 2020-03-13

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Stephen M. Rossnagel:
Sputter deposition for semiconductor manufacturing. IBM J. Res. Dev. 43(1): 163-180 (1999)

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