"Vertically scaled MOSFET gate stacks and junctions: How far are we likely ..."

Carlton M. Osburn et al. (2002)

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DOI: 10.1147/RD.462.0299

access: closed

type: Journal Article

metadata version: 2020-03-13

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Carlton M. Osburn, Indong Kim, Sungkee Han, Indranil De, Kam F. Yee, Shyam Gannavaram, Sung-Joo Lee, Chung-Ho Lee, Zhijiong J. Luo, Wenjuan Zhu, John R. Hauser, Dim-Lee Kwong, Gerald Lucovsky, T. P. Ma, Mehmet C. Öztürk:
Vertically scaled MOSFET gate stacks and junctions: How far are we likely to go? IBM J. Res. Dev. 46(2-3): 299-316 (2002)

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