"Sputter-Etching of Heterogeneous Surfaces."

Leon I. Maissel, Charles L. Standley, Lawrence V. Gregor (1972)

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DOI: 10.1147/RD.161.0067

access: closed

type: Journal Article

metadata version: 2020-03-13

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Leon I. Maissel, Charles L. Standley, Lawrence V. Gregor:
Sputter-Etching of Heterogeneous Surfaces. IBM J. Res. Dev. 16(1): 67-70 (1972)

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