"An Application of White Light Interferometry in Thin Film Measurements."

C. Lin, R. F. Sullivan (1972)

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DOI: 10.1147/RD.163.0269

access: closed

type: Journal Article

metadata version: 2020-05-12

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C. Lin, R. F. Sullivan:
An Application of White Light Interferometry in Thin Film Measurements. IBM J. Res. Dev. 16(3): 269-276 (1972)

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