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"TCAD development for lithography resolution enhancement."
Lars Liebmann et al. (2001)
- Lars Liebmann, Scott M. Mansfield, Alfred K. Wong, Mark A. Lavin, William C. Leipold, Timothy G. Dunham:
TCAD development for lithography resolution enhancement. IBM J. Res. Dev. 45(5): 651-666 (2001)
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