"Interconnect fabrication processes and the development of low-cost wiring ..."

Thomas J. Licata et al. (1995)

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DOI: 10.1147/RD.394.0419

access: closed

type: Journal Article

metadata version: 2020-03-13

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Thomas J. Licata, Evan G. Colgan, James M. E. Harper, Stephen E. Luce:
Interconnect fabrication processes and the development of low-cost wiring for CMOS products. IBM J. Res. Dev. 39(4): 419-436 (1995)

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