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"Vapor-Phase Polishing of Silicon with H2-HBr Gas Mixtures."

Lawrence V. Gregor, Pieter Balk, Frank J. Campagna (1965)

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DOI: 10.1147/RD.94.0327

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - journals/ibmrd/GregorBC65
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  - https://dblp.org/rec/journals/ibmrd/GregorBC65
Lawrence V. Gregor, Pieter Balk, Frank J. Campagna:
Vapor-Phase Polishing of Silicon with H2-HBr Gas Mixtures. IBM J. Res. Dev. 9(4): 327-329 (1965)

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