"Two-level BEOL processing for rapid iteration in MRAM development."

Michael C. Gaidis et al. (2006)

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DOI: 10.1147/RD.501.0041

access: closed

type: Journal Article

metadata version: 2023-09-30

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Michael C. Gaidis, Eugene J. O'Sullivan, Janusz Jozef Nowak, Yu Lu, Sivananda K. Kanakasabapathy, Philip Louis Trouilloud, Daniel Christopher Worledge, Solomon Assefa, Keith R. Milkove, George P. Wright, William J. Gallagher:
Two-level BEOL processing for rapid iteration in MRAM development. IBM J. Res. Dev. 50(1): 41-54 (2006)

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