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"Overview of gate linewidth control in the manufacture of CMOS logic chips."

Donald G. Chesebro et al. (1995)

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DOI: 10.1147/RD.391.0189

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - journals/ibmrd/ChesebroACEFHMNSVW95
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  - https://dblp.org/rec/journals/ibmrd/ChesebroACEFHMNSVW95
Donald G. Chesebro, James W. Adkisson, Lyman R. Clark, Steven N. Eslinger, Margaret A. Faucher, Steven J. Holmes, Raymond P. Mallette, Edward J. Nowak, Edward W. Sengle, Steven H. Voldman, Thomas W. Weeks:
Overview of gate linewidth control in the manufacture of CMOS logic chips. IBM J. Res. Dev. 39(1-2): 189-200 (1995)

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