"Scaling the gate dielectric: Materials, integration, and reliability."

Douglas A. Buchanan (1999)

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DOI: 10.1147/RD.433.0245

access: closed

type: Journal Article

metadata version: 2020-03-13

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Douglas A. Buchanan:
Scaling the gate dielectric: Materials, integration, and reliability. IBM J. Res. Dev. 43(3): 245-264 (1999)

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