"SiON high-refractive-index waveguide and planar lightwave circuits."

Gian-Luca Bona, Roland Germann, Bert J. Offrein (2003)

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DOI: 10.1147/RD.472.0239

access: closed

type: Journal Article

metadata version: 2020-03-13

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Gian-Luca Bona, Roland Germann, Bert J. Offrein:
SiON high-refractive-index waveguide and planar lightwave circuits. IBM J. Res. Dev. 47(2-3): 239-250 (2003)

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