"Polymer self assembly in semiconductor microelectronics."

Charles T. Black et al. (2007)

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DOI: 10.1147/RD.515.0605

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - https://dblp.org/rec/journals/ibmrd/BlackRBCCGKZ07
Charles T. Black, Ricardo Ruiz, Gregory Breyta, Joy Y. Cheng, Matthew E. Colburn, Kathryn W. Guarini, Ho-Cheol Kim, Ying Zhang:
Polymer self assembly in semiconductor microelectronics. IBM J. Res. Dev. 51(5): 605-633 (2007)

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