"Thin film bonding using ion beam techniques - A review."

John E. E. Baglin (1994)

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DOI: 10.1147/RD.384.0413

access: closed

type: Journal Article

metadata version: 2020-03-13

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John E. E. Baglin:
Thin film bonding using ion beam techniques - A review. IBM J. Res. Dev. 38(4): 413-422 (1994)

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