"Shallow junctions for ULSI technology."

Sandro Solmi, Renato Angelucci, Marco Merli (1990)

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DOI: 10.1002/ETT.4460010214

access: closed

type: Journal Article

metadata version: 2020-05-18

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Sandro Solmi, Renato Angelucci, Marco Merli:
Shallow junctions for ULSI technology. Eur. Trans. Telecommun. 1(2): 159-165 (1990)

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