"Doped SiO₂ deposition from TMP in APCVD."

L. D. Bartholomew et al. (1990)

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DOI: 10.1002/ETT.4460010215

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type: Journal Article

metadata version: 2020-05-18

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L. D. Bartholomew, N. M. Gralenski, J. C. Sisson, G. U. Pignatel:
Doped SiO₂ deposition from TMP in APCVD. Eur. Trans. Telecommun. 1(2): 167-172 (1990)

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