"Generation of Electrically Induced Stimuli for MEMS Self-Test."

Benoît Charlot et al. (2001)

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DOI: 10.1023/A:1012860420235

access: closed

type: Journal Article

metadata version: 2020-09-11

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Benoît Charlot, Salvador Mir, Fabien Parrain, Bernard Courtois:
Generation of Electrically Induced Stimuli for MEMS Self-Test. J. Electron. Test. 17(6): 459-470 (2001)

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