"An efficient approach to cross-fab route planning for wafer manufacturing."

Muh-Cherng Wu, Chang-Fu Shih, Chen-Fu Chen (2009)

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DOI: 10.1016/J.ESWA.2009.02.008

access: closed

type: Journal Article

metadata version: 2017-05-26

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Muh-Cherng Wu, Chang-Fu Shih, Chen-Fu Chen:
An efficient approach to cross-fab route planning for wafer manufacturing. Expert Syst. Appl. 36(8): 10962-10968 (2009)

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