"Separation of composite defect patterns on wafer bin map using support ..."

Chih-Hsuan Wang (2009)

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DOI: 10.1016/J.ESWA.2008.01.057

access: closed

type: Journal Article

metadata version: 2017-05-26

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Chih-Hsuan Wang:
Separation of composite defect patterns on wafer bin map using support vector clustering. Expert Syst. Appl. 36(2): 2554-2561 (2009)

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