"Data based segmentation and summarization for sensor data in semiconductor ..."

Eunjeong L. Park et al. (2014)

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DOI: 10.1016/J.ESWA.2013.11.001

access: closed

type: Journal Article

metadata version: 2017-05-26

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Eunjeong L. Park, Jooseoung Park, Jiwon Yang, Sungzoon Cho, Young-Hak Lee, Hae-Sang Park:
Data based segmentation and summarization for sensor data in semiconductor manufacturing. Expert Syst. Appl. 41(6): 2619-2629 (2014)

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