"Spline regression based feature extraction for semiconductor process fault ..."

Jonghyuck Park et al. (2011)

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DOI: 10.1016/J.ESWA.2010.10.062

access: closed

type: Journal Article

metadata version: 2024-05-07

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Jonghyuck Park, Ick-Hyun Kwon, Sung-Shick Kim, Jun-Geol Baek:
Spline regression based feature extraction for semiconductor process fault detection using support vector machine. Expert Syst. Appl. 38(5): 5711-5718 (2011)

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