"Virtual metrology in semiconductor manufacturing: Current status and ..."

Varad Maitra, Yutai Su, Jing Shi (2024)

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DOI: 10.1016/J.ESWA.2024.123559

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type: Journal Article

metadata version: 2024-05-31

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Varad Maitra, Yutai Su, Jing Shi:
Virtual metrology in semiconductor manufacturing: Current status and future prospects. Expert Syst. Appl. 249: 123559 (2024)

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