"Defect spatial pattern recognition using a hybrid SOM-SVM approach in ..."

Te-Sheng Li, Cheng-Lung Huang (2009)

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DOI: 10.1016/J.ESWA.2007.09.023

access: closed

type: Journal Article

metadata version: 2017-05-26

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Te-Sheng Li, Cheng-Lung Huang:
Defect spatial pattern recognition using a hybrid SOM-SVM approach in semiconductor manufacturing. Expert Syst. Appl. 36(1): 374-385 (2009)

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