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"Neural network modeling of inter-characteristics of silicon nitride film ..."
Su Jin Lee, Byungwhan Kim, Sung Wook Baik (2011)
- Su Jin Lee, Byungwhan Kim, Sung Wook Baik:
Neural network modeling of inter-characteristics of silicon nitride film deposited by using a plasma-enhanced chemical vapor deposition. Expert Syst. Appl. 38(9): 11437-11441 (2011)
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