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"Use of neural network to model X-ray photoelectron spectroscopy data for ..."
Byungwhan Kim, Jeong Kim, Seongjin Choi (2009)
- Byungwhan Kim, Jeong Kim, Seongjin Choi:
Use of neural network to model X-ray photoelectron spectroscopy data for diagnosis of plasma etch equipment. Expert Syst. Appl. 36(8): 11347-11351 (2009)
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