"Wafer map failure pattern recognition based on deep convolutional neural ..."

Shouhong Chen et al. (2022)

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DOI: 10.1016/J.ESWA.2022.118254

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type: Journal Article

metadata version: 2022-10-18

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Shouhong Chen, Yuxuan Zhang, Xingna Hou, Yuling Shang, Ping Yang:
Wafer map failure pattern recognition based on deep convolutional neural network. Expert Syst. Appl. 209: 118254 (2022)

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