"Wafer map defect pattern detection method based on improved attention ..."

Shouhong Chen et al. (2023)

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DOI: 10.1016/J.ESWA.2023.120544

access: closed

type: Journal Article

metadata version: 2023-07-07

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Shouhong Chen, Meiqi Liu, Xingna Hou, Ziren Zhu, Zhentao Huang, Tao Wang:
Wafer map defect pattern detection method based on improved attention mechanism. Expert Syst. Appl. 230: 120544 (2023)

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