"The implementation of neural network for semiconductor PECVD process."

Wen-Chin Chen et al. (2007)

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DOI: 10.1016/J.ESWA.2006.02.013

access: closed

type: Journal Article

metadata version: 2022-10-02

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Wen-Chin Chen, Amy H. I. Lee, Wei-Jaw Deng, Kan-Yuang Liu:
The implementation of neural network for semiconductor PECVD process. Expert Syst. Appl. 32(4): 1148-1153 (2007)

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