"Wafer defect pattern recognition by multi-class support vector machines by ..."

Li-Chang Chao, Lee-Ing Tong (2009)

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DOI: 10.1016/J.ESWA.2009.01.003

access: closed

type: Journal Article

metadata version: 2017-05-26

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Li-Chang Chao, Lee-Ing Tong:
Wafer defect pattern recognition by multi-class support vector machines by using a novel defect cluster index. Expert Syst. Appl. 36(6): 10158-10167 (2009)

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