"Tool capacity planning for semiconductor fabrication facilities under ..."

Jayashankar M. Swaminathan (2000)

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DOI: 10.1016/S0377-2217(98)00389-0

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type: Journal Article

metadata version: 2020-02-21

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Jayashankar M. Swaminathan:
Tool capacity planning for semiconductor fabrication facilities under demand uncertainty. Eur. J. Oper. Res. 120(3): 545-558 (2000)

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