"High performance piezoelectric AlN MEMS resonators for precise sensing in ..."

Michael Schneider et al. (2020)

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DOI: 10.1007/S00502-020-00794-W

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type: Journal Article

metadata version: 2022-04-19

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Michael Schneider, Georg Pfusterschmied, Florian Patocka, Ulrich Schmid:
High performance piezoelectric AlN MEMS resonators for precise sensing in liquids. Elektrotech. Informationstechnik 137(3): 121-127 (2020)

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