"Etching process prediction based on cascade recurrent neural network."

Zhenjie Yao et al. (2025)

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DOI: 10.1016/J.ENGAPPAI.2024.109590

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type: Journal Article

metadata version: 2025-01-25

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Zhenjie Yao, Ziyi Hu, Panpan Lai, Fengling Qin, Wenrui Wang, Zhicheng Wu, Lingfei Wang, Hua Shao, Yongfu Li, Zhiqiang Li, Zhongming Liu, Junjie Li, Rui Chen, Ling Li:
Etching process prediction based on cascade recurrent neural network. Eng. Appl. Artif. Intell. 139: 109590 (2025)

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