"A wafer surface defect detection method built on generic object detection ..."

Xinyu Wang et al. (2022)

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DOI: 10.1016/J.DSP.2022.103718

access: open

type: Journal Article

metadata version: 2022-10-24

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Xinyu Wang, Xiaoli Jia, Chuyi Jiang, Sanxin Jiang:
A wafer surface defect detection method built on generic object detection network. Digit. Signal Process. 130: 103718 (2022)

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