"Bridging time and length scales in semiconductor process model development."

Mark F. Gyure (1999)

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DOI: 10.1109/5992.790594

access: closed

type: Journal Article

metadata version: 2022-08-16

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Mark F. Gyure:
Bridging time and length scales in semiconductor process model development. Comput. Sci. Eng. 1(5): 100-103 (1999)

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