"More-than-Moore Microacoustics: A Scalable Fabrication Process for ..."

Marco Liffredo et al. (2024)

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DOI: 10.48550/ARXIV.2407.15213

access: open

type: Informal or Other Publication

metadata version: 2024-08-19

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  - journals/corr/abs-2407-15213
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  - https://dblp.org/rec/journals/corr/abs-2407-15213
Marco Liffredo, Federico Peretti, Nan Xu, Silvan Stettler, Luis Guillermo Villanueva:
More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators. CoRR abs/2407.15213 (2024)

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