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"Study on layout of double rotated serpentine springs for ..."
Biyun Ling et al. (2024)
- Biyun Ling, Yuhu Xia, Minli Cai, Xiaoyue Wang, Yaming Wu:
Study on layout of double rotated serpentine springs for vertical-comb-driven torsional micromirror. CoRR abs/2406.03038 (2024)
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