"Improved Defect Detection and Classification Method for Advanced IC Nodes ..."

Vic De Ridder et al. (2023)

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DOI: 10.48550/ARXIV.2311.11439

access: open

type: Informal or Other Publication

metadata version: 2023-11-23

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  - journals/corr/abs-2311-11439
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  - https://dblp.org/rec/journals/corr/abs-2311-11439
Vic De Ridder, Bappaditya Dey, Víctor Blanco, Sandip Halder, Bartel Van Waeyenberge:
Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy. CoRR abs/2311.11439 (2023)

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