"Neural Lithography: Close the Design-to-Manufacturing Gap in Computational ..."

Cheng Zheng, Guangyuan Zhao, Peter T. C. So (2023)

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DOI: 10.48550/ARXIV.2309.17343

access: open

type: Informal or Other Publication

metadata version: 2024-05-29

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  - journals/corr/abs-2309-17343
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  - https://dblp.org/rec/journals/corr/abs-2309-17343
Cheng Zheng, Guangyuan Zhao, Peter T. C. So:
Neural Lithography: Close the Design-to-Manufacturing Gap in Computational Optics with a 'Real2Sim' Learned Photolithography Simulator. CoRR abs/2309.17343 (2023)

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