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"Deep Learning based Defect classification and detection in SEM images: A ..."
Bappaditya Dey et al. (2022)
- Bappaditya Dey, Enrique Dehaerne, Kasem Khalil, Sandip Halder, Philippe Leray, Magdy A. Bayoumi:
Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach. CoRR abs/2211.02185 (2022)
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