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"Practical Fractional-Order Variable-Gain Super-Twisting Control with ..."

Zhian Kuang et al. (2021)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2021-02-10

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-2102-03540
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-2102-03540
Zhian Kuang, Liting Sun, Huijun Gao, Masayoshi Tomizuka:
Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems. CoRR abs/2102.03540 (2021)

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