"Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning."

Anahid N. Jalali et al. (2019)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2019-04-26

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-1904-07686
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-1904-07686
Anahid N. Jalali, Clemens Heistracher, Alexander Schindler, Bernhard Haslhofer, Tanja Nemeth, Robert Glawar, Wilfried Sihn, Peter De Boer:
Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning. CoRR abs/1904.07686 (2019)

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