"Surface Conditioning Effect on Vacuum Microelectronics Components ..."

Alain Phommahaxay et al. (2007)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2022-01-18

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0711-3276
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0711-3276
Alain Phommahaxay, Gaëlle Lissorgues, Lionel Rousseau, Tarik Bourouina, Pierre Nicole:
Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching. CoRR abs/0711.3276 (2007)

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